VDI 2083 Blatt 10
-
Ersatzlos zurückgezogen
Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems
Auf einen Blick
- Englischer Titel
-
Reinraumtechnik - Reinstmedien-Versorgungssysteme
- Erscheinungsdatum
- 1998-02
- Zurückziehungsdatum
- 2015-10
- Herausgeber
- Engl. VDI-Gesellschaft Bauen und Gebäudetechnik
- Zugehörige Handbücher
- Seitenanzahl
- 26
- Erhältlich in
- Deutsch, Englisch
- Kurzreferat
-
High-Purity/Ultra-High-Purity (HP-/UHP-) media (chemicals and gases) are being used more and more for many production purposes. The aim is to maintain the level of cleanliness between the point of supply (P.O.S.) and the point of entry (P.O.E.) or, respectively, to accept a reduction in purity only in certain defined areas where it is permissible. The purpose of this Guideline is to summarize knowledge regarding the design, construction, operation and monitoring of HP-/UHP-media supply systems. Cleanliness refers to residual contaminants such as particles, cations, anions, TOC and other specific parameters (foreign gases, humidity etc.). There is no information provided concerning cleanliness requirement conditions as these shall be determined by the respective user according to the intended utilization.
