VDI 2083 Blatt 4
-
Withdrawn
Cleanroom technology - Surface cleanliness
At a glance
- German title
-
Reinraumtechnik - Oberflächenreinheit
- Publication date
- 1996-02
- Withdrawal date
- 2007-12
- Replacement document
- Publisher
- Engl. VDI-Gesellschaft Bauen und Gebäudetechnik
- Related manuals
- Number of pages
- 51
- Available in
- German, English
- Abstract
-
The document is intended as an aid for the planning, generation, maintenance, restoration and evaluation of the required cleanliness on surfaces in cleanrooms. It includes the classification of the surface cleanliness, the requirements on the cleanliness and suitability of surfaces; the procedures for the cleaning and decontamination of surfaces; the test methods for the evaluation of the surface cleanliness.