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VDI 2083 Blatt 4 - Withdrawn

Cleanroom technology - Surface cleanliness

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German title

Reinraumtechnik - Oberflächenreinheit

Publication date
1996-02
Withdrawal date
2007-12
Replacement document
Publisher
Engl. VDI-Gesellschaft Bauen und Gebäudetechnik
Related manuals
Number of pages
51
Available in
German, English
Abstract

The document is intended as an aid for the planning, generation, maintenance, restoration and evaluation of the required cleanliness on surfaces in cleanrooms. It includes the classification of the surface cleanliness, the requirements on the cleanliness and suitability of surfaces; the procedures for the cleaning and decontamination of surfaces; the test methods for the evaluation of the surface cleanliness.

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